Research Summaries

Back Development of Miniature Directional MEMS Ultrasonic Sensor

Fiscal Year 2010
Division Graduate School of Engineering & Applied Science
Department Physics
Investigator(s) Karunasiri, Gamani
Sponsor National Security Agency (Other-Fed)
Summary The objective of the proposed research is to develop a MEMS based directional ultrasonic sensor operating at 20 kHz. The sensor will be designed with the help of COMSOL finite element modeling and fabricated using SOIMUMPS process available through MEMSCAP foundry service.
Keywords
Publications Publications, theses (not shown) and data repositories will be added to the portal record when information is available in FAIRS and brought back to the portal
Data Publications, theses (not shown) and data repositories will be added to the portal record when information is available in FAIRS and brought back to the portal