Summaries - Office of Research & Innovation
Research Summaries
Back Development of Miniature Directional MEMS Ultrasonic Sensor
Fiscal Year | 2010 |
Division | Graduate School of Engineering & Applied Science |
Department | Physics |
Investigator(s) | Karunasiri, Gamani |
Sponsor | National Security Agency (Other-Fed) |
Summary | The objective of the proposed research is to develop a MEMS based directional ultrasonic sensor operating at 20 kHz. The sensor will be designed with the help of COMSOL finite element modeling and fabricated using SOIMUMPS process available through MEMSCAP foundry service. |
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Publications | Publications, theses (not shown) and data repositories will be added to the portal record when information is available in FAIRS and brought back to the portal |
Data | Publications, theses (not shown) and data repositories will be added to the portal record when information is available in FAIRS and brought back to the portal |